CF4 - 五氟化锑-PRODUCTS - Henan Zhongtai Fluorine Industry Co., Ltd

五氟化锑

CF4

详细说明

Product: Tetrafluoromethane

CAS#: 75-73-0

Carbon tetrafluoride,also known as tetrafluoromethane,Freon 14,
Molecular formula CF₄.
CAS number 75-73-0

Physical Appearance

Melting point	-183.6℃
The boiling point	-128.1℃
Liquid density	（-130℃）1.613g/cm³
The critical temperature	-45.67� �
The critical pressure	3.73MPa
Critical density	7.1dm3/mol

At room temperature, carbon tetrafluoride is a colourless, odorless compressed gasIt has high stability, and is inflammable. At 900℃, it has no reaction with coppernickel, tungsten, or molybdenum. It does not react with water.

Use

CF4 can be widely used in etching of silicon, SiO2,SiN4, phosphorus silicon glass and tungsten film material . and also can be used in the electronic components surface cleaning and solar battery production, laser technology, space technology, metal smelting, meteorological insulation, low temperature refrigeration etc many aspects.

CF4 Quality standard

Item	Index
CF₄，％（V/V ）≥	99.999	99.995	99.99
N₂， 10^-6(V/V) ≤	4	20	40
O₂， 10^-6(V/V) � �	1	5	10
CO₂， 10^-6(V/V) ≤	1	5	10
CO， 10^-6(V/V) ≤	0.3	0.5	1
SF₆， 10^-6(V/V) ≤	1	1	5
H₂O， 10^-6(V/V) ≤	1	5	10
HF， 10^-6(V/V) ≤	0.1	0.3	0.3
TFC(CH₂F₂、 CHF₃、C₂F₃、C₃F₈)，10^-6(V/V) ≤	1	10	30
total impurities content ppm (V/V) ≤	10	50	100

Packing:seamless steel gas cylinders.

Cylinder standard	DOT/48.8 L	DOT/47L	40L	10L	4L
Valve model	CGA580（Positive screw） CGA590（Reverse screw） CGA320 DISS716